Micro-Nano Machining TiO2 Patterns without Residual Layer by Unconventional Imprinting

Usually, the residual layer remains after patterning TiO2 sol. The existence of in non-pattern region affects its application microelectronic devices. Here, a simple method, based on room-temperature imprinting, to fabricate residual-free pattern is proposed. thermoplastic polymer with Ti4+ salt was fast patterned at room temperature by different interfacial force. Then, induced into lines without under hydrothermal condition. This method provides new idea metal oxide layer, which potentially applied gas sensor, optical detector and light emitting diode.